Optical etendue matching methods for extreme ultraviolet metrology

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United States of America Patent

PATENT NO 11968772
APP PUB NO 20200383200A1
SERIAL NO

16862279

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Abstract

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An optical characterization system is disclosed. The optical characterization system may comprise a synchrotron source, an optical characterization sub-system, and a sensor configured to receive a projected image from a set of imaging optics. The optical characterization sub-system may include at least the set of illumination optics, a set of imaging optics, and a diffractive optical element, a temporal modulator or an optical waveguide configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics. A method of matching the etendue of a light beam is also disclosed.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Juschkin, Larissa Pleasanton, US 6 8
Marks, Zefram Gilroy, US 7 8
Wack, Daniel C Fredericksburg, US 20 360

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