Batch furnace assembly and method of operating a batch furnace assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11971217
APP PUB NO 20220412652A1
SERIAL NO

17844911

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Batch furnace assembly for processing wafers, comprising a process chamber housing defining a process chamber and having a process chamber opening, a wafer boat housing defining a water boat chamber, a door assembly, a differential pressure sensor, and a controller. The door assembly has a closed position in which it closes off the process chamber opening. The door assembly defines in a closed position a door assembly chamber having a purge gas inlet for supplying purge gas to the door assembly chamber for gas sealingly separating the process chamber from the wafer boat chamber. The differential pressure sensor assembly fluidly connects to the door assembly chamber and is configured to determine a pressure difference between a pressure in the door assembly chamber and a reference pressure in a reference pressure chamber. The controller is configured to establish whether the pressure difference is in a desired pressure range.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B VVERSTERKERSTRAAT 8 ALMERE 1322 AP

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jdira, Lucian Nieuw-Vennep, NL 17 1900
Oosterlaken, Theodorus G M Oudewater, NL 27 450
Terhorst, Herbert Amersfoort, NL 46 6711

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