Carrier device and control method for carrier device
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United States of America
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May 14, 2024
Grant Date -
N/A
app pub date -
Jun 9, 2021
filing date -
Jun 9, 2021
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A carrier device is provided, which includes: a moving body; a top plate arranged above and separated from the moving body; a magnet plate including a plurality of permanent magnets arranged parallel to a predetermined moving direction on a lower surface of the top plate in a manner that adjacent polarities are different; a moving control coil unit including a plurality of exciting coils arranged on an upper surface of the moving body along and separated from the magnet plate; top gap control coil units including a plurality of exciting coils arranged on the upper surface of the moving body along and separated from the magnet plate; and a controller supplying drive currents respectively to the moving control coil unit and the top gap control coil units to make the moving body move along the moving direction, and controlling a top gap.
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