Piezoelectric actuator, piezoelectric valve, and method of manufacturing piezoelectric actuator

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United States of America Patent

PATENT NO 11982368
APP PUB NO 20220316617A1
SERIAL NO

17615653

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a piezoelectric actuator that can reduce a risk of air leakage due to weakening of pressing force of a valve element against a valve seat surface and airtightness. The piezoelectric actuator is used for a piezoelectric valve that opens and closes a valve utilizing displacement of a laminated piezoelectric element. The piezoelectric actuator includes: a valve element; a laminated piezoelectric element that generates a driving force, required for operation of the valve element, as a displacement; and a displacement enlargement mechanism that enlarges a displacement of a laminated piezoelectric element and causes the enlarged displacement to act on the valve element. In the piezoelectric actuator, a surface of the valve element to be in contact with a valve seat of the piezoelectric valve is made flat and smooth in a state in which a tensile load is applied to the laminated piezoelectric element.

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Patent Owner(s)

Patent OwnerAddress
SATAKE CORPORATIONCHIYODA-KU TOKYO 101-0021
MECHANO TRANSFORMER CORPORATION4F BUILDX NO 3 2-7-12 IWAMOTO-CHO CHIYODA-KU TOKYO 1010032

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chee, Sze Keat Tokyo, JP 24 82
Ebihara, Kunio Shimotsuma, JP 1 0
Higuchi, Toshiro Tokyo, JP 68 2294
Hirata, Toshitada Shimotsuma, JP 7 19
Ito, Takafumi Tokyo, JP 141 2129
Matsushita, Tadashi Tokyo, JP 41 283

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