Storage shelf

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11990356
APP PUB NO 20210257239A1
SERIAL NO

16973448

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Importance

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Abstract

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A storage shelf includes a body frame and a shelf plate attached to the body frame with an elastic body therebetween, the storage shelf storing thereon a FOUP including a contained object. The storage shelf includes a feed nozzle on the shelf plate to feed gas to the FOUP, and a feed tube with one end communicating with the feed nozzle and the other end communicating with a main tube connected to a feed source of the gas to be fed to the FOUP, the main tube being supported by the body frame. The feed tube has a flexible portion having flexibility at least partially between the one end and the other end.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
MURATA MACHINERY LTDKYOTO-SHI KYOTO 601-8326

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Onishi, Shinji Ise, JP 32 190
Tsubaki, Tatsuo Ise, JP 21 237

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