Method for preparing a cross-size micro-nano structure array

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United States of America Patent

PATENT NO 11992889
APP PUB NO 20220339725A1
SERIAL NO

17605552

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Abstract

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A method for preparing a cross-dimension micro-nano structure array includes: S1. providing a workpiece immersed in the electrolyte as the first electrode, providing a trimming wire electrode as the second electrode and setting it above the workpiece, providing an interference beam adjuster and outputting multi-beam laser interference to irradiate the surface of the workpiece; S2. The power supply between the first electrode and the second electrode forms a loop, and drives the trimming wire electrode to reciprocate relative to the workpiece, and the workpiece undergoes electrochemical dissolution or electrochemical deposition at the corresponding position of the trimming wire electrode, and form a micro-nano structure array without a mask, and solves the problem of low output power of the existing ultrashort pulse power supply, improves the processing accuracy of the micro-nano structure array, does not require electrolyte for high-speed flow, and improves system safety and reduce the cost.

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Patent Owner(s)

Patent OwnerAddress
SOOCHOW UNIVERSITYNO 199 REN'AI ROAD SUZHOU INDUSTRIAL PARK SUZHOU JIANGSU 215123

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
He, Haidong Suzhou, CN 2 0
Ning, Xuezhong Suzhou, CN 1 0
Sun, Lining Suzhou, CN 28 216
Wang, Chunju Suzhou, CN 1 0
Xi, Zijie Suzhou, CN 1 0

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