Electrostatic substrate cleaning system and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12009227
APP PUB NO 20220359234A1
SERIAL NO

17735867

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Importance

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Abstract

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A substrate cleaning system include a chamber and a substrate stage positioned within the chamber. The substrate stage is configured to secure a substrate for cleaning with a cleaning head. The substrate cleaning system includes a robot configured to transfer the substrate between a storage receptable and the substrate stage. The cleaning head includes a disposable electrode ribbon loaded on a roller assembly. The disposable electrode ribbon includes a positive electrode and a negative electrode and is configured to electrostatically clean the substrate by electrostatically removing particles from the substrate. The roller assembly is configured to advance the disposable electrode ribbon following cleaning of the substrate.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mark, Shai Kibutz Snir, IL 8 18
Pahima, Adi Migdal Ha'emek, IL 5 3

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