Single layer nanofluidic separator chip and fluidic processor
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United States of America Patent
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Jun 18, 2024
Grant Date -
May 23, 2019
app pub date -
Nov 17, 2017
filing date -
Nov 17, 2017
priority date (Note) -
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Abstract
A fluidic processor device and a wafer including the same, the device including a nanofluidic separator chip including a nanoDLD array, a housing for housing the chip including a top plate disposed on a topside of the chip, a bottom plate disposed on a backside of the chip and fastened to the top plate, and a spacer disposed between the chip and the bottom plate to create a clearance between the chip and the bottom plate for forming a drain space on the backside of the chip.
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