Techniques for alternate pressure equalization of a sensor

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United States of America Patent

PATENT NO 12013282
APP PUB NO 20220381605A1
SERIAL NO

17818820

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An alternate venting path can be employed in a sensor device for pressure equalization. A sensor component of the device can comprise a diaphragm component and/or backplate component disposed over an acoustic port of the device. The diaphragm component can be formed with no holes to prevent liquid or particles from entering a back cavity of the device, or gap between the diaphragm component and backplate component. A venting port can be formed in the device to create an alternate venting path to the back cavity for pressure equalization for the diaphragm component. A venting component, comprising a filter, membrane, and/or hydrophobic coating, can be associated with the venting port to inhibit liquid and particles from entering the back cavity via the venting port, without degrading performance of the device. The venting component can be designed to achieve a desired low frequency corner of the sensor frequency response.

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Patent Owner(s)

Patent OwnerAddress
INVENSENSE INC1745 TECHNOLOGY DRIVE SUITE 200 SAN JOSE CA 95110

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harney, Kieran Andover, US 17 245
Parker, Jeremy Chelmsford, US 12 47

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