Nozzle apparatus and apparatus for treating substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12017234
APP PUB NO 20210316319A1
SERIAL NO

17225892

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A nozzle apparatus may comprise a nozzle body having a nozzle tip with a discharge port for spraying a treatment fluid onto a substrate; a nozzle moving member for moving the nozzle body relative to the substrate; a rotating member for rotating the nozzle body or the nozzle tip so that a treatment fluid is sprayed onto the substrate during rotation; and a control unit configured to control an operation of the nozzle moving member and the rotating member.

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First Claim

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Patent Owner(s)

  • SEMES CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Park, Min Jung Daegu, KR 27 89

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