Mask blanks and methods for depositing layers on mask blank

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12019367
APP PUB NO 20230121303A1
SERIAL NO

18084301

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Abstract

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A reflective mask blank includes a substrate, a reflective multilayer (RML) disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer has length or width dimensions smaller than the capping layer, and part of the capping layer is exposed by the absorber layer. The dimension of the absorber layer and the hard mask layer ranges between 146 cm to 148 cm. The dimensions of the substrate, the RML, and the capping layer range between 150 cm to 152 cm.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Pei-Cheng Taipei, TW 111 530
Hsueh, Wen-Chang Longtan Township, TW 12 20
Lee, Hsin-Chang Zhubei, TW 203 1090
Lien, Ta-Cheng Cyonglin Township, TW 104 198

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