Etching composition for metal nitride layer and etching method using the same

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United States of America Patent

PATENT NO 12031077
APP PUB NO 20220396733A1
SERIAL NO

17805332

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The present disclosure provides an etching composition for a metal nitride layer and an etching method of a metal nitride layer using the same, and more particularly, to an etching composition for a metal nitride layer selectively etching the metal nitride layer, an etching method of a metal nitride layer using the etching composition, and a method of manufacturing a microelectronic device, the method including an etching process performed using the etching composition.

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ENF TECHNOLOGY CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Myung Ho Yongin-si, KR 82 805
Nam, Seok Hyeon Yongin-si, KR 1 0
Park, Hyeon Woo Yongin-si, KR 8 5
Song, Myung Geun Yongin-si, KR 33 51

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