Wafer delivery device, wafer storage container, and wafer storage system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12037193
APP PUB NO 20220289483A1
SERIAL NO

17635406

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Importance

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Abstract

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In a wafer storage container, a first ring and a second ring are stacked alternatively in a vertical direction. A wafer delivery device is provided with a first ring support and a second ring support. The first ring support includes a first support piece fixed at the vertical position and a first driving mechanism to drive the first support piece. The first driving mechanism is selectively switchable among a first state, a second state, and a third state. In the first state, the first support piece overlaps with the first position in a plan view. In the second state, the first support piece overlaps with the second position in a plan view. In the third state, the first support piece does not overlap with the first and the second positions in a plan view.

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Patent Owner(s)

Patent OwnerAddress
MURATA MACHINERY LTDKYOTO JAPAN KYOTO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Yoichi Kyoto, JP 143 1583
Torazawa, Masayoshi Inuyama, JP 8 7

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