Polishing slurry composition and method for producing same

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United States of America

PATENT NO 12037516
SERIAL NO

17293236

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Abstract

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The present disclosure relates to a polishing slurry composition and a method of producing the same. The polishing slurry composition according to one embodiment of the present disclosure includes: abrasive particles dispersed so as to have positively-charged particle surfaces; a first dispersant including a nonionic linear polymer; and a second dispersant including an anionic coiling polymer, wherein the polishing slurry composition satisfies the following Expressions 1 and 2: [Expression 1] 4≤log(milling energy)<5; and [Expression 2] 20%≤Primary particle size reduction rate (%)<35%.

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Patent Owner(s)

Patent OwnerAddress
KCTECH CO LTD30 JE2GONGDAN 3-GIL MIYANG-MYEON ANSEONG-SI GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Nak Hyun Gyeonggi-do, KR 10 39
Choi, Soo Wan Seoul, KR 4 4
Hwang, Jun Ha Gyeonggi-do, KR 18 60
Park, Kwang Soo Gyeonggi-do, KR 72 311

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