Electrode formation

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United States of America Patent

PATENT NO 12046658
APP PUB NO 20210013318A1
SERIAL NO

16509204

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Abstract

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Apparatuses, methods, and systems related to electrode formation are described. A first portion of a top electrode is formed over a dielectric material of a storage node. A metal oxide is formed over the first portion of the electrode. A second portion of the electrode is formed over the metal oxide.

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Patent Owner(s)

Patent OwnerAddress
MICRON TECHNOLOGY INC8000 SOUTH FEDERAL WAY BOISE ID 83716-9632

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beeler, Richard Boise, US 10 29
Cheng, An-Jen B Boise, US 5 6
Kelkar, Sanket S Boise, US 11 18
Kim, Dojun Boise, US 8 5
Kraus, Brenda D Boise, US 61 1106
Petz, Christopher W Boise, US 40 152
Rocklein, Matthew N Boise, US 41 240

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