Cleaning method with in-line SPM processing

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United States of America Patent

PATENT NO 12051599
APP PUB NO 20230290652A1
SERIAL NO

18198174

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Abstract

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A method for removing particulates from a plurality of substrates includes opening a first access port in a top of a first container holding a cleaning fluid bath, inserting a first substrate through the first access port to a first support, closing the first access port, opening a second access port in the top of the first container, inserting a second substrate through the second access port to a second support, closing the second access port, opening the first access port, removing the first substrate through the first access port and delivering the first substrate into a rinsing station, closing the first access port, opening the second access port, removing the second substrate through the second access port and delivering the second substrate into the rinsing station, and closing the second access port.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Brian J Palo Alto, US 204 5717
Kirkpatrick, Brian K Allen, US 66 267
Mikhaylichenko, Ekaterina A San Jose, US 28 4

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