Conditioning chamber component

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12064795
APP PUB NO 20210205858A1
SERIAL NO

17211518

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Abstract

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A method for conditioning a component of a wafer processing chamber is provided. The component is placed in an ultrasonic conditioning solution in an ultrasonic solution tank. Ultrasonic energy is applied through the ultrasonic conditioning solution to the component to clean the component. The component is submerged in a megasonic conditioning solution in a tank. Megasonic energy is applied through the megasonic conditioning solution to the component to clean the component.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Avoyan, Armen Glendale, US 35 413
Daugherty, John Fremont, US 73 1138
Hundi, Girish Dublin, US 2 8
La, Croix Cliff Gardnerville, US 13 26
Outka, Duane Fremont, US 40 1714
Shih, Hong Santa Clara, US 107 3985
Xu, Lin Fremont, US 214 5625
Yasseri, Amir A San Jose, US 18 396

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