Radiation sensor with an integrated mechanical optical modulator and related manufacturing process

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United States of America

PATENT NO 12066324
SERIAL NO

17530785

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Abstract

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Radiation sensor including a detection assembly and a chopper assembly, which are mechanically coupled to delimit a main cavity; and wherein the chopper assembly includes: a suspended movable structure, which extends in the main cavity; and an actuation structure, which is electrically controllable to cause a change of position of the suspended movable structure. The detection unit includes a detection structure, which faces the main cavity and includes a number of detection devices. The suspended movable structure includes a first shield of conductive material, which shields the detection devices from the radiation, the shielding of the detection devices being a function of the position of the suspended movable structure.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R L20864 AGRATE BRIANZA (MB)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Castagna, Maria Eloisa Catania, IT 27 58
Duqi, Enri Milan, IT 56 120
Vaiana, Michele San Giovanni la Punta, IT 28 146

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