Advanced temperature monitoring system and methods for semiconductor manufacture productivity

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United States of America Patent

PATENT NO 12068180
APP PUB NO 20190221458A1
SERIAL NO

16247026

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Abstract

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Embodiments herein provide methods of monitoring temperatures of fluid delivery conduits for delivering fluids to, and other components external to, a processing volume of a processing chamber used in electronic device fabrication manufacturing, and monitoring systems related thereto. In one embodiment, a method of monitoring a processing system includes receiving, through a data acquisition device, temperature information from one or more temperature sensors and receiving context information from a system controller coupled to a processing system comprising the processing chamber. Here, the one or more temperature sensors are disposed in one or more locations external to a processing volume of a processing chamber. The context information relates to instructions executed by the system controller to control one or more operations of the processing system.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Johnson, Michael W Austin, US 121 5040
Lu, Xuesong Santa Clara, US 22 57
Oh, Jang Seok San Ramon, US 10 41
Pasupathy, Balaji Chennai, IN 2 4
Werner, Joseph C Santa Clara, US 11 183
Zhang, Lin San Jose, US 453 3838

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