Phase-shift reticle for use in photolithography

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United States of America

PATENT NO 12078921
SERIAL NO

17529840

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Abstract

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A phase-shift reticle for a photolithography process in semiconductor fabrication is provided. The reticle includes a substrate, a reflective structure, a pattern defining layer and a phase shifter. The reflective structure is disposed over the substrate. The pattern defining layer includes a first material and is deposited over the reflective structure. The pattern defining layer comprises a pattern trench. The phase shifter includes a second material and disposed in the pattern trench. A transmittance of the second material is different from a transmittance of the first material.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chun Kuang Zhubei, TW 5 210
Leavy, Montray Singapore, SG 26 239
Yeh, Tse-An Taipei, TW 2 0
Zheng, Jun-Fei Westport, US 37 380

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