System and method for monitoring and controlling extreme ultraviolet photolithography processes

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United States of America Patent

PATENT NO 12085860
APP PUB NO 20220229371A1
SERIAL NO

17150685

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Abstract

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A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. An array of sensors sense the extreme ultraviolet radiation and charged particles emitted by the droplets. A control system analyses sensor signals from the sensors and adjusts plasma generation parameters responsive to the sensor signals.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDHSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Li-Jui Hsinchu, TW 306 606
Chen, Tai-Yu Hsinchu, TW 79 235
Chien, Shang-Chieh Hsinchu, TW 193 696
Liu, Heng-Hsin Hsinchu, TW 158 281

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