Platen rotation device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12090602
APP PUB NO 20210331286A1
SERIAL NO

17371709

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Abstract

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A device includes a rotator assembly configured to control a rotational kinetic energy of a wafer-platen based on an electrical energy input. The device further includes a controller configured to control the rotational kinetic energy of the wafer-platen, wherein a rotational velocity of the wafer-platen is either increased or decreased. The device further includes a converter configured to generate an electrical energy output of the rotator assembly based on decreased rotational kinetic energy of the wafer-platen. The device further includes an energy storage device configured to store the electrical energy outputted by the rotator assembly based on the decreased rotational kinetic energy of the wafer-platen.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Bruce Hsinchu, TW 4 4
Ko, Huang-Chu Hsinchu, TW 9 18
Tien, Chia-Ying Hsinchu, TW 8 14

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