Atomic layer etching processes

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12094686
APP PUB NO 20230253182A1
SERIAL NO

18188255

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Atomic layer etching (ALE) processes are disclosed. In some embodiments, the methods comprise at least one etch cycle in which the substrate is alternately and sequentially exposed to a first vapor phase non-metal halide reactant and a second vapor phase halide reactant. In some embodiments both the first and second reactants are chloride reactants. In some embodiments the first reactant is fluorinating gas and the second reactant is a chlorinating gas. In some embodiments a thermal ALE cycle is used in which the substrate is not contacted with a plasma reactant.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B VVERSTERKERSTRAAT 8 ALMERE 1322AP

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blomberg, Tom E Vantaa, FI 58 5935
Haukka, Suvi P Helsinki, FI 104 17903
Sharma, Varun Helsinki, FI 103 2735
Tuominen, Marko Espoo, FI 102 10592
Zhu, Chiyu Helsinki, FI 71 9572

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Mar 17, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Mar 17, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Mar 17, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00