Asymmetrical sealing and gas flow control device
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United States of America
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Sep 17, 2024
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app pub date -
Dec 13, 2021
filing date -
Dec 13, 2021
priority date (Note) -
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Abstract
A sealing device configured for use in a vacuum chamber between a reaction region of the vacuum chamber and an exhaust port includes a ring-shaped body with an upper surface and a lower surface. A distance between the upper surface and the lower surface of the sealing device is a thickness of the ring-shaped body. The thickness of the ring-shaped body differs along a circumference of the ring-shaped body such that the ring-shaped body has a wedge shape. The thickness of the ring-shaped body, around its circumference is dependent upon a structure of the exhaust port.
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