Method for forming a crack in an edge region of a donor substrate

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United States of America Patent

PATENT NO 12097641
APP PUB NO 20210213643A1
SERIAL NO

17214256

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Abstract

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A method for separating a solid-body layer from a donor substrate includes providing a donor substrate having a planar surface, a longitudinal axis orthogonal to the planar surface, and a peripheral surface, and producing modifications within the donor substrate using at least one LASER beam. The at least one LASER beam penetrates the donor substrate via the peripheral surface at an angle not equal to 90° relative to the longitudinal axis of the donor substrate. The method further includes producing a stress-inducing polymer layer on the planar surface of the donor substrate, and producing mechanical stresses in the donor substrate by a thermal treatment of the stress-inducing polymer layer. The mechanical stresses produce a crack for separating the solid-body layer, and wherein the crack propagates along the modifications.

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Patent Owner(s)

Patent OwnerAddress
SILTECTRA GMBH01099 DRESDEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beyer, Christian Freiberg, DE 70 458
Richter, Jan Dresden, DE 79 579
Schilling, Franz Radeberg, DE 13 67
Swoboda, Marko David Dresden, DE 8 2

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