Liquid chemical for forming water-repellent protective film, method for preparing same, and method for manufacturing surface-treated body

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United States of America Patent

PATENT NO 12098319
APP PUB NO 20200339850A1
SERIAL NO

16962159

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Abstract

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The present invention is directed to a liquid chemical for forming a water-repellent protective film on a silicon element-containing wafer surface, a method of preparing the liquid chemical and a method of manufacturing a surface-treated body with the use of the liquid chemical, wherein the liquid chemical includes the following components: (I) a silylation agent; (II) at least one kind of nitrogen-containing compound selected from the group consisting of those of the following general formulas [1] and [2]; and (III) an organic solvent.

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Patent Owner(s)

  • CENTRAL GLASS COMPANY LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukui, Yuki Ube, JP 25 95
Kondo, Katsuya Auderghem, BE 10 45
Okumura, Yuzo Ube, JP 14 5
Ryokawa, Atsushi Ichikawa, JP 16 78
Yamada, Shuhei Ube, JP 107 1367

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