Pressure control system, pressure control method, and pressure control program

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United States of America Patent

PATENT NO 12098940
APP PUB NO 20220228896A1
SERIAL NO

17571758

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention controls convergent pressure of a closed space provided with a fluid resistance at high speed while an upstream valve provided on the upstream of the fluid resistance prevents overshooting. A pressure control system is provided with a fluid resistance in a channel forming a closed space and is configured to control pressure of the closed space by controlling an upstream valve provided on the upstream of the fluid resistance. The pressure control system includes a convergent pressure arithmetic unit and a valve controller. The convergent pressure arithmetic unit calculates convergent pressure of the closed space when the upstream valve is fully closed using at least one of upstream pressure and downstream pressure on the fluid resistance in the channel. The valve controller compares the calculated convergent pressure with a predetermined target convergent pressure and fully close the upstream valve based on the result of the comparison.

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Patent Owner(s)

Patent OwnerAddress
HORIBA STEC CO LTDKYOTO JAPAN KYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tokunaga, Kazuya Kyoto, JP 26 211

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