Conductive polymeric layers for charge dissipation

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United States of America Patent

PATENT NO 12101920
APP PUB NO 20230337407A1
SERIAL NO

18131208

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Abstract

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A conductive polymeric layer on an electrostatic chuck. The conductive polymeric layer comprises a conductive polymer and a photosensitive polymer. The conductivity of the conductive polymer promotes charge dissipation by the conductive polymeric layer, while the photosensitivity of the photosensitive polymer allows the surface of the conductive polymeric layer to be photopatterned. The extent to which the conductive polymeric layer is conductive and photosensitive may be modulated by varying the relative amounts of the conductive polymer and the photosensitive polymer.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Zhifeng Acton, US 44 266
Liu, Yan Lexington, US 664 5733
Liu, Yuxuan Wayland, US 32 77
Varanasi, Pushkara Rao Poughkeepsie, US 39 541
Venkatraman, Chandra Tyngsboro, US 16 553
Waldfried, Carlo Middleton, US 67 4638

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