Processing liquid nozzle and cleaning apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12109580
APP PUB NO 20220371041A1
SERIAL NO

17763371

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Abstract

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A processing liquid nozzle includes: an ultrasonic wave generator including a oscillator that generates ultrasonic waves and a oscillating body that is joined to the oscillator; a first supply flow path configured to supply a first liquid to a position in contact with the oscillating body of the ultrasonic wave generator; an ejection flow path configured to supply the first liquid to which the ultrasonic waves are applied by the ultrasonic wave generator to an ejection port; and a second supply flow path connected to the ejection flow path on a downstream side from the ultrasonic wave generator and configured to supply a second liquid to the ejection flow path.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO 107-6325

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goto, Daisuke Kumamoto, JP 176 722
Koga, Takahiro Kumamoto, JP 13 445
Morikawa, Katsuhiro Kumamoto, JP 44 638

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