Mass flow controller and flow control method therefor

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United States of America Patent

PATENT NO 12111671
APP PUB NO 20240231398A1
SERIAL NO

18562942

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A mass flow controller includes control module, fluid passage, flow regulating valve, flow sensor disposed between inlet and flow regulating valve, and pressure sensor disposed at outlet. The control module is configured to enter pressure feedback regulation mode when variation amount of target flow value exceeds preset threshold, and enter flow feedback regulation mode after fluid flow value detected by flow sensor meets first stabilization condition. The control module is configured to, in pressure feedback regulation mode, perform calculation according to fluid pressure value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount. The control module is also configured to, in flow feedback regulation mode, perform calculation according to fluid flow value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount.

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Patent Owner(s)

Patent OwnerAddress
BEIJING AURASKY ELECTRONICS CO LTD4S01 FLOOR 4 BUILDING 1 NO 8 WENCHANG AVE BDA DAXING DISTRICT BEIJING 100176 100176

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Deng, Bowen Beijing, CN 4 0
Mu, Changhua Beijing, CN 1 0
Zou, Yitao Beijing, CN 2 0

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