Ultrasonic cleaning method

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United States of America Patent

PATENT NO 12115564
APP PUB NO 20240269716A1
SERIAL NO

18022270

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An ultrasonic cleaning method of the invention includes: a cleaning liquid coating step (S101), coating a cleaning liquid on a front surface of an electronic component held on a cleaning stage; a pealing step (S103), irradiating the front surface of the electronic component coated with the cleaning liquid with ultrasonic waves from ultrasonic speakers installed to an acoustic head and peeling off a foreign matter attached to the front surface from the front surface; and an attracting step (S104), concentrating the ultrasonic waves generated from the ultrasonic speakers at a gap between a casing and a holding surface of the cleaning stage to form a low pressure region whose pressure is lower than atmospheric pressure at a central lower part of the casing, and attracting the foreign matter peeled off from the front surface of the electronic component and the cleaning liquid coated on the front surface.

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Patent Owner(s)

Patent OwnerAddress
YAMAHA ROBOTICS HOLDINGS CO LTD51-1 INADAIRA 2-CHOME MUSASHIMURAYAMA-SHI TOKYO 2088585 ?2088585

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kirkby, Michael Tokyo, JP 7 0
Landaez, Garcia Ysmaldo Jose Tokyo, JP 2 0
Munakata, Hiroshi Tokyo, JP 40 218

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