Substrate drying device and method of drying substrate using the same preliminary class

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United States of America Patent

PATENT NO 12119240
APP PUB NO 20230187231A1
SERIAL NO

18081948

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate drying device includes: an upper chamber body including an inlet configured to introduce supercritical fluid into a chamber space; a lower chamber body including an outlet configured to discharge the supercritical fluid out of the chamber space; and a plurality of vibration devices including a plurality of vibration modules configured to generate ultrasonic waves having different frequencies from each other, and substrate holders arranged on the plurality of vibration modules and configured to hold a wafer, wherein the plurality of vibration devices are arranged in the chamber space.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI GYEONGGI-DO 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Donok Yongin-si, KR 4 0
Park, Sejin Hwaseong-si, KR 32 120
Park, Sungyong Suwon-si, KR 61 333
Sul, Ansook Hwaseong-si, KR 7 0

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