Micro-electromechanical system device using a metallic movable part and methods for forming the same

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United States of America Patent

PATENT NO 12122665
APP PUB NO 20230066841A1
SERIAL NO

17459253

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Abstract

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A micro-electromechanical system (MEMS) device includes a movable comb structure located in a cavity within an enclosure, and a stationary structure affixed to the enclosure. The movable comb structure includes a comb shaft portion and movable comb fingers laterally protruding from the comb shaft portion. The movable comb structure includes a metallic material portion. The movable structure and the stationary structure are configured to generate an electrical output signal based on lateral movement of the movable structure relative to the stationary structure.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDNO 8 LI-HSIN 6 ROAD HSINCHU SCIENCE PARK HSINCHU ROC 30077

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Ying-Hsun Taoyuan, TW 22 17
Liu, Tao-Cheng Hsinchu, TW 26 29
Yen, Chen-Hsuan Taichung, TW 7 12

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