Laser interferometer and control method for laser interferometer

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United States of America Patent

PATENT NO 12123892
SERIAL NO

17412355

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Abstract

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A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and a demodulation circuit that performs a demodulation process for demodulating the sample signal from the light reception signal, and the demodulation circuit intermittently performs the demodulation process.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONTOKYO 160-8801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamada, Kohei Shiojiri, JP 139 520

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