Megasonic clean with cavity property monitoring

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12128456
APP PUB NO 20230241649A1
SERIAL NO

18133972

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Importance

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Abstract

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A method of cleaning a substrate in a megasonic cleaning chamber, comprises: flowing a cleaning fluid through a supply tube in a megasonic cleaning chamber toward a substrate; using a megasonic transducer to generate megasonic waves through the cleaning fluid and create cavities in the cleaning fluid; and using one or more sensors to determine properties of the cavities in-situ based on emissions received from the cavities. A non-transitory computer readable medium has instructions stored thereon that, when executed, causes the method to be performed.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dagan, Eliyahu Shlomo Sunnyvale, US 12 1
Makhamreh, Khalid Los Gatos, US 28 194
Wu, Banqiu San Jose, US 64 1486

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