Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12132464
APP PUB NO 20220278666A1
SERIAL NO

17743328

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Abstract

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Acoustic filters and methods of fabrication are disclosed. A filter device includes a substrate and a single-crystal piezoelectric plate, a back surface of the piezoelectric plate attached to a surface of the substrate. The filter device includes a plurality of acoustic resonators including one or more shunt resonators and one or more series resonators. Each of the plurality of acoustic resonators includes an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate, interleaved fingers of the IDT disposed on a respective diaphragm formed by a respective portion of the piezoelectric plate that spans a respective cavity in the substrate. A divided frequency setting layer is formed on at least some of the one or more shunt resonators but not on the one or more series resonators.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDNAGAOKAKYO-SHI KYOTO 617-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yantchev, Ventsislav Sofia, BG 138 3509

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