Substrate treatment device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12138671
APP PUB NO 20210276055A1
SERIAL NO

17181227

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, a substrate treatment device includes a placement stand configured to rotate a substrate, a cooling part configured to supply a cooling gas into a space between the placement stand and the substrate, a liquid supplier configured to supply a liquid on a surface of the substrate opposite to the placement stand side, a detector configured to detect a state of the liquid on the surface of the substrate, and a controller controlling at least one of a rotation speed of the substrate, a flow rate of the cooling gas, or a supply amount of the liquid. The controller sets the liquid on the surface of the substrate to be in a supercooled state, obtains a temperature of the liquid in the supercooled state at a start of freezing, and is configured to calculate a removal ratio of a contamination.

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Patent Owner(s)

Patent OwnerAddress
SHIBAURA MECHATRONICS CORPORATION5-1 KASAMA 2-CHOME SAKAE-KU YOKOHAMA-SHI KANAGAWA 247-8610

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Demura, Kensuke Yokohama, JP 25 41
Matsushima, Daisuke Yokohama, JP 18 52
Nakamura, Minami Yokohama, JP 5 1

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