Microelectromechanical sensor device with improved stability to stress

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12139396
APP PUB NO 20220041429A1
SERIAL NO

17384566

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Abstract

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A microelectromechanical sensor device has a detection structure including: a substrate having a first surface; a mobile structure having an inertial mass suspended above the substrate at a first area of the first surface so as to perform at least one inertial movement with respect to the substrate; and a fixed structure having fixed electrodes suspended above the substrate at the first area and defining with the mobile structure a capacitive coupling to form at least one sensing capacitor. The device further includes a single monolithic mechanical-anchorage structure positioned at a second area of the first surface separate from the first area and coupled to the mobile structure, the fixed structure, and the substrate and connection elements that couple the mobile structure and the fixed structure mechanically to the single mechanical-anchorage structure.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R L20041 AGRATE BRIANZA (MILANO)

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gattere, Gabriele Castronno, IT 52 66
Rizzini, Francesco Passirano, IT 25 32
Valzasina, Carlo Gessate, IT 57 209

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