Showerhead faceplates with angled gas distribution passages for semiconductor processing tools

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12139791
APP PUB NO 20230243034A1
SERIAL NO

18001697

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Abstract

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Showerhead faceplates for semiconductor processing chambers are provided that include one or more sets of gas distribution passages therethrough that extend at least partially along axes that are at an oblique angle to the showerhead faceplate center axis. Such angled gas distribution passages may be used to tailor the gas flow characteristics of such showerhead faceplates to produce various desired gas flow behaviors in the gas that is delivered to the wafer via such showerhead faceplates.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, la Llera Anthony Fremont, US 36 2870
Dorai, Rajesh Pleasanton, US 22 187
Holland, John San Jose, US 116 3929
Mankidy, Pratik Fremont, US 12 1399

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