Method for producing tungsten hexafluoride

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12145857
APP PUB NO 20210253442A1
SERIAL NO

17268848

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Abstract

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A production method of tungsten hexafluoride according to one embodiment of the present invention includes: a first step of bringing tungsten having an oxide film into contact with a fluorine gas or inert gas containing 50 vol ppm to 50 vol % of hydrogen fluoride in a reactor, thereby removing the oxide film from the tungsten; and a second step of bringing the tungsten from which the oxide film has been removed by the first step into contact with a fluorine-containing gas to form tungsten hexafluoride.

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Patent Owner(s)

Patent OwnerAddress
CENTRAL GLASS COMPANY LIMITED5253 OAZA OKIUBE UBE-SHI YAMAGUCHI 7550001 ?7550001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kikuchi, Akiou Ube, JP 29 122
Nagatomo, Masakiyo Higashiomi, JP 7 1
Takeda, Yuta Ube, JP 11 22
Yao, Akifumi Ube, JP 51 410

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