Cooling device, semiconductor manufacturing apparatus, and semiconductor manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12146696
APP PUB NO 20210404711A1
SERIAL NO

17355345

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Abstract

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A cooling device includes a circulation system configured to circulate a refrigerant in a condenser so as to return the refrigerant to the condenser via a pump, a heater, a throttle valve, and a vaporizer; and a cooling system that includes a heat exchanger arranged in the condenser. The condenser includes a first portion where the refrigerant is present in a liquid state and a second portion where the refrigerant is present in a gas state, and at least a portion of the heat exchanger is arranged in the second portion.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 146-8501

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nomoto, Makoto Tochigi, JP 19 71

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