Physical quantity sensor, physical quantity sensor device, and inertial measurement unit

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12153064
APP PUB NO 20220128591A1
SERIAL NO

17511659

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A physical quantity sensor includes a substrate that has a first fixed electrode and a movable body that has a first mass portion facing the first fixed electrode. The first mass portion includes a first region, and a second region farther from the rotation axis than the first region, a first through-hole group is provided in the first region, and a second through-hole group is provided in the second region, and the movable body has a first surface on a substrate side, and a second surface. The first surface of the first mass portion is provided with a step or a slope such that a first gap distance of a first gap between the first mass portion and the first fixed electrode in the first region is smaller than a second gap distance of a second gap between the first mass portion and the first fixed electrode in the second region. A depth of through-holes of the first through-hole group and the second through-hole group is smaller than a maximum thickness of the movable body.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONTOKYO 160-8801

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tanaka, Satoru Chino, JP 341 3727

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