Line narrowing gas laser device and electronic device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12155168
APP PUB NO 20230187892A1
SERIAL NO

18163689

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A line narrowing gas laser device includes a line narrowing device, an output coupling mirror, a laser chamber arranged on an optical path of an optical resonator, a first holder which supports the output coupling mirror, a second holder which supports the first holder to be rotatable about a rotation axis of the first holder, and an adjustment device supported by the second holder and being in contact with the first holder to rotate the first holder about the rotation axis. The line narrowing device has a characteristic of changing, into a first direction, beam pointing of laser light output toward the output coupling mirror when temperature inside the line narrowing device rises. The second holder and the adjustment device rotate the first holder in a direction in which a change in the first direction in the beam pointing of the laser light is suppressed by thermal expansion.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INC400 OAZA YOKOKURASHINDEN OYAMA-SHI TOCHIGI 323-8558

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furusato, Hiroshi Oyama, JP 7 18
Saito, Yusuke Oyama, JP 120 337
Terao, Tokinori Oyama, JP 1 1
Watanabe, Yosuke Oyama, JP 86 426
Yashiro, Masanori Oyama, JP 18 28

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