Imprinting apparatus including silicon master with a plurality of nanofeatures and an anti-stick layer having a cyclosiloxane and method of forming

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United States of America

PATENT NO 12157252
APP PUB NO 20220088834A1
SERIAL NO

17541089

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Abstract

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An imprinting apparatus includes a silicon master having a plurality of nanofeatures defined therein. An anti-stick layer coats the silicon master, the anti-stick layer including a molecule having a cyclosiloxane with at least one silane functional group. A method includes forming a master template by: depositing a formulation on a silicon master including a plurality of nanofeatures defined therein, the formulation including a solvent and a molecule having a cyclosiloxane with at least one silane functional group; and curing the formulation, thereby forming an anti-stick layer on the silicon master, the anti-stick layer including the molecule. The method further includes depositing a silicon-based working stamp material on the anti-stick layer of the master template; curing the silicon-based working stamp material to form a working stamp including a negative replica of the plurality of nanofeatures; and releasing the working stamp from the master template.

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Patent Owner(s)

  • ILLUMINA INC.; ILLUMINA CAMBRIDGE LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Andrew A Cambridge, GB 54 660
George, Wayne N Ilford, GB 63 576
Merkel, Timothy J San Diego, US 16 19
Morrison, Julia Grays, GB 9 15
Richez, Alexandre Cambridge, GB 45 103
Zak, Audrey Rose Carlsbad, US 6 12

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