Resistor geometry

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12159898
APP PUB NO 20220293308A1
SERIAL NO

17636099

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Importance

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Abstract

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A thin-film resistor and a method for fabricating a thin-film resistor are provided. The thin-film resistor comprises a first terminal, a second terminal, and a resistor body providing a resistive current path between the first terminal and the second terminal, and the method comprises depositing a first layer of conductive material onto at least one of the supporting structure and the resistor body, applying a first lithographic mask to the first layer, and etching the first layer to form the first terminal; and depositing a second layer of conductive material onto at least one of the supporting structure and the resistor body, applying a second lithographic mask to the second layer, and etching the second layer to form the second terminal, wherein the first lithographic mask is different to the second lithographic mask, and a lateral separation of the first terminal and the second terminal is less than an in-plane minimum feature size of the first and second lithographic masks

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Patent Owner(s)

Patent OwnerAddress
PRAGMATIC PRINTING LTDSEDGEFIELD DURHAM TS21 3FG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mann, Robert Sedgefield, GB 17 325
Price, Richard Sedgefield, GB 67 327

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