Method for producing purified chlorosilanes

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12162763
APP PUB NO 20220073358A1
SERIAL NO

17424565

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Abstract

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A method for producing purified chlorosilanes includes bringing crude chlorosilanes, such as crude trichlorosilane and crude silicon tetrachloride, which contain a boron compound and/or a phosphorus compound, into contact with chlorine (preferably 1 ppm mole to 3000 ppm mole with respect to 1 mole of crude chlorosilanes) in presence of alkylphenol such as 2-methylphenol, and then distilling the crude chlorosilanes.

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Patent Owner(s)

  • TOKUYAMA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iiyama, Shoji Yamaguchi, JP 5 0
Sakai, Junya Yamaguchi, JP 17 6

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