Nanoscale thin film deposition systems

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12168244
APP PUB NO 20230088746A1
SERIAL NO

17801481

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Abstract

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A method and system for nanoscale precision programmable profiling on substrates. Profiling material is dispensed on a substrate or a superstrate. The superstrate is brought in contact with the substrate. The profiling material is then cured after bringing the superstrate in contact with the substrate. The superstrate is separated from the substrate after curing. An optical metrology of points on the substrate corresponding to the final substrate profile is then performed.

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Patent Owner(s)

Patent OwnerAddress
BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM210 WEST 7TH ST AUSTIN TX 78701 UNITED STATES OF AMERICA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, David Austin, US 13 281
Dunn, Lawrence Austin, US 9 55
Pandya, Parth Austin, US 5 12
Singhal, Shrawan Austin, US 26 264
Sreenivasan, Sidlgata V Austin, US 214 5594

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