Polishing agent for synthetic quartz glass substrate and method for polishing synthetic quartz glass substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12173193
APP PUB NO 20200399504A1
SERIAL NO

16765040

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Abstract

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A polishing agent for a synthetic quartz glass substrate. The polishing agent contains wet ceria particles and non-spherical silica particles. The wet ceria particles have an average primary particle diameter of 30 nm to 50 nm. The non-spherical silica particles have an average primary particle diameter of 80 nm to 120 nm. This provides a polishing agent for a synthetic quartz glass substrate, the polishing agent having high polishing rate and being capable of sufficiently reducing generation of defects due to polishing.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTD4-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-0005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takahashi, Mitsuhito Annaka, JP 22 40

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