Slurry and polishing method

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United States of America

PATENT NO 12173219
APP PUB NO 20210301179A1
SERIAL NO

17262646

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Abstract

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A slurry containing abrasive grains and a liquid medium, in which the abrasive grains include first particles and second particles in contact with the first particles, the second particles contain at least one metal compound selected from the group consisting of a metal oxide and a metal hydroxide, the metal compound contains a metal capable of taking a plurality of valences, and a ratio of the lowest valence among the plurality of valences of the metal is 0.10 or more in X-ray photoelectron spectroscopy.

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Patent Owner(s)

Patent OwnerAddress
RESONAC CORPORATION9-1 HIGASHI-SHIMBASHI 1-CHOME MINATO-KU TOKYO 1057325 ?1057325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hasegawa, Tomoyasu Tokyo, JP 23 106
Iwano, Tomohiro Tokyo, JP 56 332
Kukita, Tomomi Tokyo, JP 20 24
Matsumoto, Takaaki Tokyo, JP 30 156
Nomura, Satoyuki Tokyo, JP 32 307

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