Thermal compression bonder nozzle with vacuum relief features

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12176318
APP PUB NO 20230238352A1
SERIAL NO

18130338

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Abstract

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An apparatus comprising a bonding nozzle that has one or more channels in a bonding surface. The one or more channels comprise a first channel portion in an inner region of the bonding surface and a second channel portion along an outer periphery of the bonding surface. The one or more channels are in fluid communication with a vacuum port. A vacuum relief conduit within the bonding nozzle comprises a first opening into the second channel portion along the outer periphery of the bonding surface, and a second opening along an exterior wall of the bonding nozzle.

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Patent Owner(s)

Patent OwnerAddress
INTEL CORPORATIONSANTA CLARA CA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mellody, James Phoenix, US 5 24
Oka, Mihir Chandler, US 5 4
Srinivasan, Kartik Gilbert, US 21 198
Tan, Wei Chandler, US 222 2119

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